SAWATEC Hotplate HP-200-Z

FEATURES (BASIC CONFIGURATION) Temperature control with digital target and actual value display User-friendly process configuration with touch screen Quick start/stop function for repeat processes Automatic temperature limit switch, no overheating Heating ramp up possible with 24 program steps Free programmable heating curve with max. 10 °C/min (25 – 300 °C) Free programmable cooling curve with max. 5 °C/min (300 – 40 °C) Hotplate with multi-zone heating (9 zones) and with protection glass for easy cleaning Easy levelling of the hotplate, prevents discharge of photoresist Manual substrate fixation via vacuum Manual loading and unloading of substrates N2 flushing program controlled, no oxidation HMDS priming program controlled, optimized adhesion ADDITIONAL FUNCTIONS • Setup tool for optimal leveling of the Hotplate Temperature range: ambient temperature up to 300 °C Temperature accuracy: +/- 0.3 °C at 100 °C