SAWATEC Coolplates CP-200

FEATURES (BASIC CONFIGURATION) Digital temperature with actual value display User-friendly process configuration with touch screen Quick start/stop function for repeat processes Proximity/loading pins, can be easily adapted to different substrate sizes Manual substrate fixation via vacuum Manual loading and unloading of substrates PERFORMANCE DATA Temperature range: 5 – 23 °C (temperature < 18 °C with chiller) Electrical driven proximity/loading pins Proximity adjustment from 0 – 1 mm (0.1 mm increments) Substrate size: max. 200 mm (round or square) Pin-circle-diameters: 45 – 192 mm (2 – 8“) ADDITIONAL FUNCTIONS (OPTIONS) Setup tool for optimal height adjustment of the pins and leveling of the Coolplate Can be combined with a commercially available chiller for precise control of the cooling temperature or rather the cooling liquid