Ultra-High Purity Chemical Delivery Module (CDM) and Valve Manifold Box Integration Improving Semiconductor Yield

Ultra-High Purity Chemical Delivery Module (CDM) and Valve Manifold Box Integration Improving Semiconductor Yield In the competitive world of semiconductor fabrication, maximizing wafer yield depends on the seamless integration of an Ultra-High Purity (UHP) Chemical Delivery Module (CDM) and a Valve Manifold Box (VMB). This combination creates a “smart circulatory system” that ensures process chemicals reach production tools without a single atom of contamination. The CDM acts as the precision engine, using PLC-controlled automation to blend concentrated etchants and slurries into exact “recipes” with parts-per-trillion (ppt) purity. Once prepared, the fluid is passed to the VMB, which serves as the distribution hub. By using modular manifold designs and 316L electropolished stainless steel, the VMB can safely route chemicals to multiple production tools simultaneously. This integration is a game-changer for facility uptime. Because the VMB allows for tool-specific isolation, technicians can perform maintenance on one production line without shutting down the entire factory. This modularity, combined with the CDM’s real-time monitoring and leak detection, significantly reduces the risk of “killer defects” on silicon wafers. By maintaining a constant, ultra-clean flow of process fluids, the CDM-VMB partnership allows fabs to achieve up to 99.9% operational uptime and superior chip reliability. Technical Data Model JW-300-LDS Special gas cabinet size W1900*D800*H2100 Control cabinet power supply Control power supply: 220VAC, 50HZ, 500W, heating power supply: 220VAC, 50HZ, 1-6KW Purge PN2,1/4”MVCJ High pressure holding GN2.1/4” MVCJ Vacuum 1/2” MVCJ VENT drain pipe CDA driver, 1/4″ SWG Pneumatic air source OD 150MM, silane 810m³/hr; others 204m³/hr Cabinet ventilation OD 150MM, silane 810m³/hr; others 204m³/hr Standard equipment Automatic switching, automatic purging, explosion-proof and anti-leaving cabinet, explosion-proof self-locking door, explosion-proof glass observation window, leakage alarm, remote cut-off, negative pressure alarm Operation interface 10″ color touch screen Optional *UV/IR Flame Detector *Cylinder heating *Panel heating *Ethernet communication module *Weight Scale *Excess Flow Switch *Smoke Sensor Switch Application: Semiconductor Photovoltaic Solar energy Liquid crystal panel Optical fiber Other production fields Speciality Chemicals Handled HF- Hydrofluoric acid HCL- Hydrochloric acid H2O2- Hydrogen Peroxide KOH- Potassium Hydroxide HNO3- Nitric acid NH4OH- Ammonium Hydroxide H2SO4- Sulfuric acid Function: Liquid chemical filtration Liquid chemical sampling Liquid chemical circulation Liquid chemical delivering chemical delivery module (CDM) and chemical delivery system (CDS) chemical delivery module (CDM) and chemical delivery system (CDS) Fluid Chemical Delivery Module And Chemical Delivery System Chemical automatic liquid supply equipment Shenzhen Jewellok Technology Co., Ltd. is a premier global manufacturer specializing in the engineering and production of Ultra-High Purity (UHP) gas and liquid chemical delivery systems. Headquartered in the high-tech hub of Shenzhen, China, we provide the mission-critical fluid infrastructure required for sub-micron semiconductor fabrication, photovoltaic energy, and advanced EV battery manufacturing. At the core of our portfolio are the Chemical Delivery Module (CDM) and Chemical Delivery System (CDS). These systems are engineered to meet the industry’s most stringent parts-per-trillion (ppt) purity standards. While our bulk CDS solutions manage the large-scale distribution of process fluids, our CDMs provide precision, point-of-use blending and dilution. By utilizing 316L electropolished stainless steel with a 5Ra surface finish, we ensure zero-particle shedding and maximum chemical inertness across all fluid paths. Jewellok distinguishes itself through a commitment to “Intelligence + Safety.” Our systems feature proprietary UHP diaphragm valves with metal-to-metal seals and advanced PLC-controlled automation. This integration allows for precise recipe management and predictive maintenance, which has been shown to reduce facility downtime by up to 30%. Furthermore, our hardware is built with multi-tiered safety protocols, including secondary containment, nitrogen blanketing, and automated leak detection to protect both your personnel and your product yield. As a trusted partner to the world’s leading high-tech manufacturers, Jewellok provides more than just hardware; we provide the “circulatory system” of the modern smart factory. From initial design to installation and technical support, we ensure your facility operates with 99.9% uptime and absolute purity.