Smart EFEM In-situ SiC Marco Wafer AOI
In-situ無縫升級 可直接整合至現有設備，不增加空間佔用 Inline Real-Time 即時監控 全時監控晶圓Macro外觀瑕疵，精準執行 Chipping 與 Notch 缺口異常偵測 及時防險與 Root-cause 辨識 即時監控攔檢重大產線異常與連帶破片損失
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