Chemical Delivery Unit for Semiconductor Equipment

Chemical Delivery Unit (CDU) designed for the safe storage, filtration, monitoring, and delivery of process chemicals used in semiconductor wet processing applications. Suitable for supplying wet benches, process tanks, chemical baths, and other semiconductor manufacturing equipment. CDU systems may be configured for acids, bases, solvents, DI water, and specialty chemicals, with options for filtration, recirculation, level monitoring, leak detection, and automated chemical delivery.