EXS Dry Screw Vacuum Pumps

Applications The EXS pump is suitable for a range of applications in various industries including: Lithium-ion battery Electrode drying Electrolyte filling Formation Metallurgy Vacuum Brazing E-beam welding Nitro carburising Low pressure nitriding Low pressure carburising Carbon vapour impregnation Sintering Metal injection moulding Precision investment casting Vacuum arc refining Steel degassing Plasma processes Plasma welding Plasma nitriding Vacuum chamber evacuation Space simulation chambers Gas recovery/circulation Load lock chambers Solar Silicon crystal-pulling PV lamination Coating Roll web coating Hard coating (CVD/DLC) Surface activation Plasma spray Glass coating Technical specifications Specification Unit EXS160 EXS160/1750 EXS250 EXS250/2600 General Ultimate vacuum mbar (Torr) 1x10-2 (8x10-3) <1x10-3 (<8x10-4) 1x10-2 (8x10-3) <1x10-3 (<8x10-4) Peak pumping speed m3/hr (cfm) 160 (94) 1200 (706) 250 (147) 1900 (1118) Maximum rotor speed Rev/min 6600 DP: 6600 MB: 6120 6600 DP: 6600 MB: 6120 Inlet/Outlet ISO63/NW40 ISO100/NW40 ISO63/NW40 ISO160/NW40 Electrical Electrical supply V 380-460V 3Ph 50/60Hz 200-230V 3Ph 50/60Hz 380-460V 3Ph 50/60Hz 200-230V 3Ph 50/60Hz 380-460V 3Ph 50/60Hz 200-230V 3Ph 50/60Hz 380-460V 3Ph 50/60Hz 200-230V 3Ph 50/60Hz Ultimate power kW (hp) 3.8 (5.1) 5.1 (6.8) 4.0 (5.4) 5.3 (7.1) Full load power kW (hp) 5.0 (6.7) 7.4 (9.9) 9.0 (12.1) 9.7 (13.0) Cooling Connection inch ⅜" BSP male ⅜" BSP male ⅜" BSP male ⅜" BSP male Cooling flow (Always on) l/min (gal/min) 4.0 (1.1) 7.0 (1.9) 4.0 (1.1) 7.0 (1.9) Minimum differential pressure bar 1 1 1 1 Maximum supply pressure barg (psig) 6.9 (100) 6.9 (100) 6.9 (100) 6.9 (100) Temperature °C (°F) 5-40 (41-104) 5-40 (41-104) 5-40 (41-104) 5-40 (41-104) Purge Connection inch ½" BSP male ½" BSP male ½" BSP male ½" BSP male Pressure barg (psig) 2.5-6.9 (36-100) 2.5-6.9 (36-100) 2.5-6.9 (36-100) 2.5-6.9 (36-100) Shaft seal flow (Always on) l/min (gal/min) 12 (3.17) 12 (3.17) 12 (3.17) 12 (3.17) Gas ballast flow (Manual adj.) l/min (gal/min) 0-50 (0-13.2) 0-50 (0-13.2) 0-50 (0-13.2) 0-50 (0-13.2) Operation Ambient temperature range °C (°F) 5-40 (41-104) 5-40 (41-104) 5-40 (41-104) 5-40 (41-104) Noise level with silencer dB(A) <64 <64 <64 <64 Maximum exhaust back pressure bara (psig) 1.2 (17.4) 1.2 (17.4) 1.2 (17.4) 1.2 (17.4) Lubrication Oil PFPE Drynert 25/6 PFPE Drynert 25/6 PFPE Drynert 25/6 PFPE Drynert 25/6 Oil volume l (gal) 0.7 (0.2) 1.4 (0.4) 0.7 (0.2) 1.4 (0.4) Specification Unit EXS450 EXS450/2600 EXS450/4200 EXS750 EXS750/2600 EXS750/4200 General Ultimate vacuum mbar (Torr) 1x10-2 (8x10-3) <1x10-3 (<8x10-4) <1x10-3 (<8x10-4) 1x10-2 (8x10-3) <1x10-3 (<8x10-4) <1x10-3 (<8x10-4) Peak pumping speed m3/hr (cfm) 450 (265) 2200 (1295) 3026 (1781) 740 (435) 2300 (1354) 3450 (2032) Maximum rotor speed Rev/min 6600 DP: 6600 MB: 6120 DP: 6600 MB: 6120 6600 DP: 6600 MB: 6120 DP: 6600 MB: 6120 Inlet/Outlet ISO100/NW50 ISO160/ISO63 ISO160/ISO63 ISO100/NW50 ISO160/ISO63 ISO160/ISO63 Electrical Electrical supply V 380-460V 3Ph 50/60Hz 200-230V 3Ph 50/60Hz 380-460V 3Ph 50/60Hz 200-230V 3Ph 50/60Hz 380-460V 3Ph 50/60Hz 200-230V 3Ph 50/60Hz 380 - 460 3Ph 50/60Hz 380 - 460 3Ph 50/60Hz 380 - 460 3Ph 50/60Hz Ultimate power kW (hp) 7.2 (9.6) 8.8 (11.8) 9.4 (12.6) 10.5 (14) 11.1 (14.9) 12 (16) Full load power kW (hp) 17.3 (23.2) 16 (21.5) 18.5 (24.8) 22 (30) 24 (32.2) 24 (32.2) Cooling Connection inch ⅜" BSP male ⅜" BSP male ⅜" BSP male ⅜" BSP male ⅜" BSP male ⅜" BSP male Cooling flow (Always on) l/min (gal/min) 10 (2.6) 12 (3.2) 12 (3.2) 12 (3.2) 15 (4) 15 (4) Minimum differential pressure bar 1 1 1 1 1 1 Maximum supply pressure barg (psig) 6.9 (100) 6.9 (100) 6.9 (100) 6.9 (100) 6.9 (100) 6.9 (100) Temperature °C (°F) 5-40 (41-104) 5-40 (41-104) 5-40 (41-104) 5-40 (41-104) 5-40 (41-104) 5-40 (41-104) Purge Connection inch ½" BSP male ½" BSP male ½" BSP male ½" BSP male ½" BSP male ½" BSP male Pressure barg (psig) 2.5-6.9 (36-100) 2.5-6.9 (36-100) 2.5-6.9 (36-100) 2.5-6.9 (36-100) 2.5-6.9 (36-100) 2.5-6.9 (36-100) Shaft seal flow (Always on) l/min (gal/min) 12 (3.17) 12 (3.17) 12 (3.17) 12 (3.17) 12 (3.17) 12 (3.17) Gas ballast flow (Manual adj.) l/min (gal/min) 0-130 (0-34.3) 0-130 (0-34.3) 0-130 (0-34.3) 0-130 (0-34.3) 0-130 (0-34.3) 0-130 (0-34.3) Operation Ambient temperature range °C (°F) 5-40 (41-104) 5-40 (41-104) 5-40 (41-104) 5-40 (41-104) 5-40 (41-104) 5-40 (41-104) Noise level with silencer dB(A) <64 <64 <64 <70 <70 <70 Maximum exhaust back pressure bara (psig) 1.2 (17.4) 1.2 (17.4) 1.2 (17.4) 1.2 (17.4) 1.2 (17.4) 1.2 (17.4) Lubrication Oil PFPE Drynert 25/6 PFPE Drynert 25/6 PFPE Drynert 25/6 PFPE Drynert 25/6 PFPE Drynert 25/6 PFPE Drynert 25/6 Oil volume l (gal) 1.8 (0.5) 2.5 (0.7) 3.6 (1.0) 2.4 (0.6) 3.1 (0.8) 4.2 (1.1)