ENT-K182-60MB-47C02 Entegris/Fluoroware Wafer Cassette / Carrier
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Entegris/Fluoroware K182-60MB-97C02 wafer cassette for 6″ / 150mm wafers. 25 slots, black STAT-PRO® 9000. Cross reference: ePB-6/150-25. SITEK Part Number ENT-K182-60MB-47C02 Alternative Part Number K82-60MB-97C02
Specifications
- SRD Series
- 40 Series, 60 Series & 70 Series, 80 Series & 300 Series, Not Sure
- Oiler
- With Oiler, Without Oiler, Not Sure
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