1PC FRn03P Flow Sensor

The FRn03P series micro flow gas mass flow sensors are specifically designed for various micro-flow process control applications. This series of products utilizes the MEMS thermal principle and is suitable for dry, clean gases. The sensor features surface-mount installation, making it particularly suitable for multi-sensor integration in confined spaces. Application The sensor features surface-mount installation, making it particularly suitable for multi-sensor integration in confined spaces. Features High sensor sensitivity with very low start-up flow Surface-mount installation, compact structure Multiple signal output options High stability and repeatability across the full scale Specifications Parameter Value Unit Flow Measurement Maximum Flow 50/100/200/300/400/500 1000/2000/3000/4000/5000 SCCM Measurement Accuracy ±（2+0.5FS） % Repeatability 0.50 % Max. Working Pressure 500 kPa Pressure Drop at Max. Flow ≤60 ≤1000 Pa Operating Temperature 0～50 ℃ Signal Output Output Mode Digital I²C and Analog 0.5V～4.5VDC I²C Communication Rate 100 kHz Signal Response Time ≤50 ms Electrical Parameters Operating Voltage 5～15 VDC Operating Current ≤30 mA Electrical Interface PH2.0-5P Plug-in Connector Others Storage Temperature -20～65 ℃ Measurement Medium Dry, clean non-corrosive gases The company's flow sensors are calibrated by default using air at 20℃, 101.325 kPa. Production conditions are temperature 22±2℃, cleanroom, (30%～35%) RH environment. If special requirements exist, calibration is performed according to customer requirements. * The description and specifications might be changed without notice. Please contact us for the latest information before placing orders.