6" Polishing Fixture With Vacuum Jig for Precision & Automatic Thinning and Polishing- PF6P

Features Precision Polishing Jig for accurate wafer/substrate polishing and back-thinning Thickness control screw fixture with a resolution of 0.001 mm to limit stock remove This Polishing fixture can be fit with Unipol 502 and any precision 12" or larger polishing machine with yoke support to achieve automatic polishing or lapping Super-hard tungsten alloy is welded on the bottom of the jig for polishing resistance Maximum sample thickness: 12mm Maximum travel distance: 12 mm Sample Holder Vacuum chuck The maximum size of a wafer or substrate is 6" diameter If the thickness of the sample is greater than 0.15 mm, adopt vacuum absorption. If the thickness is less than 0.15 mm, please use wax Digital Micrometer One digital micrometer is included with a resolution of +/- 1 micron for more accurate lapping. Pressure Indicator One digital balance is included for measuring the fixture weight ( pressure ) Weight can be adjusted by screws while measuring on the digital balance from 1g to 5000g. Vacuum Absorption and Filter Requires a vacuum pump with a rate > 70 L/ min. To protect the vacuum pump from any moisture and liquid, connect a filter flask between the fixture and the pump Size O.D: 198mm; Height: 295mm Application notes This fixture can also polish < 6" wafer via the blue tape method Cut a 6 " diameter blue tape, then stick the <6" in diameter wafer or < 4.2"(W) x 4.2"(L) irregular substrate on the tape Then put the 6" blue tape with the wafer in the vacuum to vacuum the chunk Standard Package Items Names Qty 1 Vacuum pump 1 2 Filter flask 1 3 Glass plate 3