SAWATEC Hotplate HP-300

FEATURES (BASIC CONFIGURATION) Temperature control with digital target and actual value display User-friendly process configuration with touch screen Quick start/stop function for repeat processes Automatic temperature limit switch, no overheating Heating ramp up possible with 24 program steps Proximity as well as loading pins, can be easily adapted to different substrate sizes Hot-plate with protection glass, easy cleaning Easy levelling of the hot-plate, prevents discharge of photoresist Manual substrate fixation via vacuum Manual loading and unloading of the substrates ADDITIONAL FUNCTIONS (OPTIONS) N2 flushing program controlled, no oxidation HMDS priming program controlled, optimized adhesion Setup tool for optimal height adjustment of the pins and leveling of the Hotplate PERFORMANCE DATA Temperature range: ambient temperature up to 250 °C Temperature accuracy: +/- 0.8 °C at 100 °C Electrical driven proximity and loading pins (stroke 8 mm) Program controlled adjustable proximity pins (0.1 mm increments) Pin-circle-diameters: 45 – 292 mm (2 – 12″)