Insert/Adapter: A182-60MU Rotor to A182-39MU Cassette

Insert/Adapter: A182-60MU Rotor to A182-39MU Cassette

SKU: 06-02390

SITEK Rotor Inserts enable running different wafer sizes in a single SRD chamber, reducing changeover time and eliminating the need for full rotor replacements.

  • These inserts are designed for use with new SITEK A182-60MU rotors (not compatible with older Semitool-style rotors).
Specifications
SRD Series
40 Series, 60 Series & 70 Series, 80 Series & 300 Series, Not Sure
Oiler
With Oiler, Without Oiler, Not Sure

AI Readiness

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