ePB-6/150-25-R.2 ePak Wafer Cassette/Carrier
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Description The ePAK Entegris/Fluoroware ePB-6/150-25-R.2-N-eM-47-BLK Wafer Cassette/Carrier is designed for handling 150 mm (6″) semiconductor wafers in wet processing, transport, and storage applications. Constructed from PEEK, it features a 25-slot configuration for secure wafer handling and excellent chemical and temperature resistance. SITEK Part Number ePB-6/150-25-R.2 Alternative Part Number ePB-6/150-25-R.2-N-eM-47-BLK
Specifications
- SRD Series
- 40 Series, 60 Series & 70 Series, 80 Series & 300 Series, Not Sure
- Oiler
- With Oiler, Without Oiler, Not Sure
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