Disco DTG 8460 Taiko Grinder
Disco DTG 8460 Taiko Grinder, 12" - 2 Load ports - Power: 200 VAC, 3 Phase (Without Transformer) - 50/60 Hz - Full load current: 50 A - Main breaker rating: 60 A - Largest load amperage: 24 A - Interrupt capacity: 35 kA - Short circuit current rating: 1.5 kA - Air pressure: 0.5 – 0.8 MPa - Cooling water pressure: 0.2 – 0.3 MPa - Maximum spindle speed: 7,000 rpm Including: - 3X Universal Chuck Table for 12" - Low Vibration Air Bearing Spindle - Robotic Wafer Transportation System - Vacuum Pump System - GUI (Graphical Operation Panel & Video Display Unit) - Electrical Unit & Main Body Lifting Jig Set - Signal Tower - CE Mark & EMC Conformity - English Operation / Trouble Shooting Manual - Standard Accessories Options: - Duct Unit Assembly - Filtration & Air Suction - Spindle Protection Device in case of air leakage switch to reserve air/N2 - Wafer Protection Device - hold Wafer during Vacuum leakage - UPS (Uninterruptible Power Supply) with English Manual - Disco Standard SECS / GEM Software IT Protocol - T2 Pad Cleaning System (Standard: universal, non ceramic) - Software Modification Offset for Positioning Table - External Water Nozzle on Z1 + Z2 Wheel with Adjustable Flow Rate - Adjustable Water Flow on T2 Pad to avoid drying up pad surface - Automatic Set-up of wheel & chuck after wheel change - Ionizer on Spinner Station - Water Temperature Unit DTU 1531 - 2 Separate Temperature process cycles for spindle cooling water & grinding water (without transformer) - FOUP Opener Unit Double Port with Mapping system - Features for Fab Automation & Back Up - Dedicated options to improve cleanliness / particle level - Available option for accuracy improvement - Machine Training 2020 Vintage
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