Sawatec Spin Module SM-150

FEATURES (BASIC CONFIGURATION) Up to 50 programmes with 24 segments each can be programmed Quick start function for repeat processes User-friendly process configuration with touch screen Process parameters: spin speed, acceleration, segment time, dosing functions Rotational direction can be selected (CW, CCW) Manual loading and unloading of the substrates Substrate fixation via vacuum incl. vacuum guard Manual cover with air flow inlet and sensor lock control Acoustic signal after the end of the process ADDITIONAL FUNCTIONS (OPTIONS) Semi-automatic cartridge dosing system, 50 ml glass cartridge with manual dispensing arm and suck back function Nitrogen (N2) purge of the process chamber to prevent oxidation Start/stop foot switch for ease of operation (cable length 1.8 m) Bowl assembly made of anodised aluminium or stainless steel Wafer alignment tool 1” – 12” (round) Bowl protection insert made of aluminium Vacuum pump PERFORMANCE DATA Speed range: 0 to 10’000 rpm +/-1 rpm Speed acceleration: 0 – 10’000 rpm in 1 sec.* Delay: 10’000 rpm – 0 in 2,5 sec.* Process time up to 7‘200 seconds